Category Archives: Publications
High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology
S. Pourkamali and F. Ayazi, “High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology,” 5th Silicon RF topical meeting 2004, pp. 147-150.
18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance
S. Pourkamali and F. Ayazi, “18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance,” proceedings, Hilton Head 2004, solid-state sensor, actuator and Microsystems workshop, pp. 392-393.
A new input switching scheme for a capacitive micro-g accelerometer
B. Vakili, S. Pourkamali and F. Ayazi, “A new input switching scheme for a capacitive micro-g accelerometer,” proceedings, Symposium on VLSI Circuits, 2004, pp. 310 – 313.
Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps
S. Pourkamali, and F. Ayazi, “Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps,” proceedings, MEMS’04, pp. 813-816.
Electrostatically coupled micromechanical beam filters
S. Pourkamali, R. Abdolvand, G. K. Ho, and F. Ayazi, “Electrostatically coupled micromechanical beam filters,” proceedings, MEMS’04, pp. 584-587.
A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface
B. Vakili, S. Pourkamali, and F. Ayazi, “A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface,” proceedings, MEMS’04, pp.572-575.
SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps
S. Pourkamali, and F. Ayazi, “SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps,” proceedings, Transducers ’03, 2003, pp.837-840.
A 600kHz electrically coupled MEMS bandpass filter
S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,” proceedings, MEMS‘03, 2003, pp. 702-705.
Single crystal silicon HARPSS capacitive resonators with submicron gap spacings
S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.