S. Pourkamali, and F. Ayazi, “Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps,” proceedings, MEMS’04, pp. 813-816.
S. Pourkamali, and F. Ayazi, “Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps,” proceedings, MEMS’04, pp. 813-816.