S. Pourkamali, R. Abdolvand, G. K. Ho, and F. Ayazi, “Electrostatically coupled micromechanical beam filters,” proceedings, MEMS’04, pp. 584-587.
S. Pourkamali, R. Abdolvand, G. K. Ho, and F. Ayazi, “Electrostatically coupled micromechanical beam filters,” proceedings, MEMS’04, pp. 584-587.