S. Pourkamali and F. Ayazi, “18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance,” proceedings, Hilton Head 2004, solid-state sensor, actuator and Microsystems workshop, pp. 392-393.
S. Pourkamali and F. Ayazi, “18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance,” proceedings, Hilton Head 2004, solid-state sensor, actuator and Microsystems workshop, pp. 392-393.