UTD Cleanroom Research Laboratory
The UTD Cleanroom Research Laboratory which is a class 10,000 cleanroom with 5,866 sq. ft. is located at the NSERL building. The Laboratory includes facilities for device fabrication and characterization with a range of equipment, such as plasma etch, PECVD, LPCVD, Metallization (sputter, e-gun, thermal evap) wet chemical stations, thermal (oxidation/diffusion, RTP) Lithography, and surface analysis tools. For a complete list of equipment please visit Cleanroom Research Laboratory at University of Texas at Dallas.