S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,” proceedings, MEMS‘03, 2003, pp. 702-705.
S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,” proceedings, MEMS‘03, 2003, pp. 702-705.