B. Vakili, S. Pourkamali, and F. Ayazi, “A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface,” proceedings, MEMS’04, pp.572-575.
B. Vakili, S. Pourkamali, and F. Ayazi, “A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface,” proceedings, MEMS’04, pp.572-575.