Author Archives: Web Admin

Piezoelectric Resonant MEMS Balances with High Liquid Phase Q

M. Mahdavi, A. Moses, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.

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Internal Thermal-Piezoresistive Sensitivity Enhancement of MEMS Gyroscopes

X. Guo, and S. Pourkamali, “Internal Thermal-Piezoresistive Sensitivity Enhancement of MEMS Gyroscopes,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.

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Self-Sustained High-Frequenc

A. Ramezany, and S. Pourkamali, “Resonant Piezoresistors for Narrow-Band Amplification,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, Provisional Patent Application filed June 2014, Application Abandoned, June 2015.

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Micromechanical Resonators

A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Micromechanical Resonators,” US Patent No. 9,571,013, February 2017.

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Cellular Array Electrostatic Actuator

S. Pourkamali, A. Abbasalipour, P. Palit, “Cellular Array Electrostatic Actuator”, Provisional Patent Application, Serial No: 62/945,561, UTD Technology ID: 19053P1, December 2019.

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Real-Time MEMS Aerosol Impactors

J. C. Wilson and S. Pourkamali, “Real-Time MEMS Aerosol Impactors,” Patent Application No. 20160047728, February 2016.

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Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications

V. Qaradaghi, B. Dousti, Y. Choi, G. S. Lee, W. Hu, and S. Pourkamali, “Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 66, Issue 3, March

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Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances

M. Mahdavi, A. Abbasalipour, and S. Pourkamali, “Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances,” IEEE Sensors Journal, vol. 19, no. 1, pp. 113–120, Jan. 2019.

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Nanomechanical Disk Resonators as Highly Sensitive Mass Sensors

V. Qaradaghi, A. Ramezany, S. Babu, and S. Pourkamali, “Nanomechanical Disk Resonators as Highly Sensitive Mass Sensors”, IEEE Electron Device Letters (EDL), Vol. 39, Issue 11, Nov. 2018.

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Micro-Resonator-on-Membrane for Real-Time Mass Detection in Liquid Phase

M. Mahdavi and S. Pourkamali, “Micro-Resonator-on-Membrane for Real-Time Mass Detection in Liquid Phase,” IEEE Sensors Letters, vol. 2, no. 3, pp. 1–4, Sep. 2018.

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