Issued US Patents
- A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Micromechanical Resonators,” US Patent No. 9,571,013, February 2017.
- F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.
- F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent No. 7,176,770, February 2007.
- F. Ayazi, and S. Pourkamali, “Electrically-coupled micro-electro-mechanical filter systems and methods,” US patent No.7,098,757, August 2006.
- F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings therein and microstructures formed thereby,” US patent No. 7,056,757, June 2006.
- F. Ayazi, and S. Pourkamali, “Capacitive resonators and methods of fabrication,” US patent No. 7,023,065, April 2006.
Pending Patent Applications
- S. Pourkamali, A. Abbasalipour, P. Palit, “Cellular Array Electrostatic Actuator”, Provisional Patent Application, Serial No: 62/945,561, UTD Technology ID: 19053P1, December 2019.
- J. C. Wilson and S. Pourkamali, “Real-Time MEMS Aerosol Impactors,” Patent Application No. 20160047728, February 2016.
Provisional Patent Applications and Invention Disclosures Filed with University Offices of Technology Transfer
- M. Mahdavi, A. Moses, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.
- X. Guo, and S. Pourkamali, “Internal Thermal-Piezoresistive Sensitivity Enhancement of MEMS Gyroscopes,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.
- A. Ramezany, and S. Pourkamali, “Resonant Piezoresistors for Narrow-Band Amplification,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, Provisional Patent Application filed June 2014, Application Abandoned, June 2015.
- S. Pourkamali, “Electrostatic Internal Actuation of Micro/Nanomechanical Resonators using Embedded Monolithic Semiconductor PN Junctions,” May 2009. Provisional Application Filed, December 2009, Application abandoned December 2010.
- S. Pourkamali, “Low-Cost Solar Energy Harvesting Using Semiconductor Powder,” October 2008. Application abandoned.
- S. Pourkamali, “Arrays of Partially Encapsulated Silicon Capacitive Resonators for High Resolution Wireless Chemical and Biological Sensing,” August 2007. Application abandoned.