Patents, Pending patent applications and Invention Disclosures

Issued US Patents

  1. A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Micromechanical Resonators,” US Patent No. 9,571,013, February 2017.
  2. F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.
  3. F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent No. 7,176,770, February 2007.
  4. F. Ayazi, and S. Pourkamali, “Electrically-coupled micro-electro-mechanical filter systems and methods,” US patent No.7,098,757, August 2006.
  5. F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings therein and microstructures formed thereby,” US patent No. 7,056,757, June 2006.
  6. F. Ayazi, and S. Pourkamali, “Capacitive resonators and methods of fabrication,” US patent No. 7,023,065, April 2006.

Pending Patent Applications

  1. S. Pourkamali, A. Abbasalipour, P. Palit, “Cellular Array Electrostatic Actuator”, Provisional Patent Application, Serial No: 62/945,561, UTD Technology ID: 19053P1, December 2019.
  2. J. C. Wilson and S. Pourkamali, “Real-Time MEMS Aerosol Impactors,” Patent Application No. 20160047728, February 2016.

Provisional Patent Applications and Invention Disclosures Filed with University Offices of Technology Transfer

  1. M. Mahdavi, A. Moses, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.
  2. X. Guo, and S. Pourkamali, “Internal Thermal-Piezoresistive Sensitivity Enhancement of MEMS Gyroscopes,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, October 2014, Application not pursued.
  3. A. Ramezany, and S. Pourkamali, “Resonant Piezoresistors for Narrow-Band Amplification,” Invention Disclosure filed with UT-Dallas Office of Technology Commercialization, Provisional Patent Application filed June 2014, Application Abandoned, June 2015.
  4. S. Pourkamali, “Electrostatic Internal Actuation of Micro/Nanomechanical Resonators using Embedded Monolithic Semiconductor PN Junctions,” May 2009. Provisional Application Filed, December 2009, Application abandoned December 2010.
  5. S. Pourkamali, “Low-Cost Solar Energy Harvesting Using Semiconductor Powder,” October 2008. Application abandoned.
  6. S. Pourkamali, “Arrays of Partially Encapsulated Silicon Capacitive Resonators for High Resolution Wireless Chemical and Biological Sensing,” August 2007. Application abandoned.