The objective of this project is to explore the potentials of the internal thermal-piezoresistive self Q and displacement amplification effect in silicon resonant microstructures for realization of ultra-high sensitivity and low noise magnetometers.
In this project, we use a single mask fabrication process to fabricate high frequency single crystal silicon resonators on SOI substrates.
The purpose of this project is development of a new class of micro/nanoscale aerosol particle sensors.
The objective of this project is to explore and develop a new enabling technology for low-cost high through-put parallel scanning probe nanolithography.
In this project we use a top-down nano-precision technique based on single-mask standard fabrication process that allows low-cost and highly controlled batch fabrication and integration of silicon nanobeams within micro and nanoscale electromechanical systems on (100) silicon wafers.
In this project we use micromechanical resonant sensors for detection of concentrations of flammable organic vapors in the environment.
The main goal of this project is to use Micro-electromechanical resonant devices with their electronic readout capability as highly sensitive biomolecular sensors. Adsorption of molecules on the resonator surfaces increases the mass of the resonating plate resulting in a drop in the resonant frequency of the resonator.
With the limited fossil fuel reserves and the environmental (e.g. global warming prospects), the appeal for large scale exploitation of clean renewable energy sources such as wind and solar is greater than ever.
In this project we use silicon micro-mechanical resonators as ultra-sensitive mass sensors for the detection of trace amounts of copper ions in water samples.