S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.
S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.