S. Pourkamali, and F. Ayazi, “SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps,” proceedings, Transducers ’03, 2003, pp.837-840.
S. Pourkamali, and F. Ayazi, “SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps,” proceedings, Transducers ’03, 2003, pp.837-840.