Category Archives: Refereed Conference Publications
Ultra-Low Power Self-Computing Binary Output Digital MEMS Accelerometer
V. Kumar, X. Guo, R. Jafari, S. Pourkamali, IEEE MEMS 2016.
Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer
V. Kumar, X. Guo, S. Pourkamali, “Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer”, IEEE Nano, 2015.
Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators”, IEEE Nano 2015.
Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry
A. Ramezany, M.Mahdavi, A. Moses, S. Pourkamali, “Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry”, IEEE Transducers 2015.
Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection
V. Kumar, M. Mahdavi, X. Guo, E. Mehdizadeh and S. Pourkamali, “Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection”,To be presented at IEEE MEMS 2015.
Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations
M. Maldonado Garcia, E. Mehdizadeh, V. Kumar, J.C Wilson and S. Pourkamali, “Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations”, To be presented at IEEE MEMS 2015.
Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films
E. Mehdizadeh and S. Pourkamali, “Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films,” The 40th Annual Conference of the IEEE Industrial Electronics Society, 2014.
High-Q Lorentz Force MEMS Magnetometer with Internal Self-Amplification
E. Mehdizadeh, V. Kumar, and S. Pourkamali, “High-Q Lorentz Force MEMS Magnetometer with Internal Self-Amplification”, To be presented at 2014 IEEE Sensors.
An Ultra High-Q Micromechanical In-plane Tuning Fork
Xiaobo Guo, Emad Mehdizadeh, Varun Kumar, Aliraza Ramezany and Siavash Pourkamali, “An Ultra High-Q Micromechanical In-plane Tuning Fork”, To be presented at 2014 IEEE Sensors
Piezoelectric Resonant MEMS Balances with High Liquid Phase Q
M. Mahdavi, G. Guerra, H. McCurry, Reza Abolvand, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q”, To be presented at 2014 IEEE Sensors.