Tag Archives: micro-nano
Aerosol Impactor with Embedded MEMS Resonant Mass Balance for Real-Time Particulate Mass Concentration Monitoring
E. Mehdizadeh, J. C. Wilson, A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Aerosol Impactor with Embedded MEMS Resonant Mass Balance for Real-Time Particulate Mass Concentration Monitoring,” International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), 2013.
Individual air-borne particle mass measurement using high frequency micromechanical resonators
A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011
Thin-film piezoelectric-on-silicon particle mass sensors
B. Harrington, A. Hajjam, J. C. Wilson, S. Pourkamali, R. Abdolvand, “Thin-film piezoelectric-on-silicon particle mass sensors,” IEEE international Frequency Control Symposium (IFCS), 2010.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling
A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010.