S. Pourkamali and F. Ayazi, “High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology,” 5th Silicon RF topical meeting 2004, pp. 147-150.
S. Pourkamali and F. Ayazi, “High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology,” 5th Silicon RF topical meeting 2004, pp. 147-150.