Category Archives: Publications
A finite element analysis of thermoelastic damping in vented MEMS beam resonators
X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013.
Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
Resonant MEMS Piezoresistors for narrow band electronic amplification
A. Ramezany, M. Mahdavi, X. Guo, and S. Pourkamlai, “Resonant MEMS Piezoresistors for narrow band electronic amplification,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
Thermally Actuated Resonators
S. Pourkamali, “Thermally Actuated Resonators,” Encyclopedia of Nanotechnology, Springer-Verlag, pp. 2712–2723, 2012
High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips
E.Mehdizadeh, and S. Pourkamali, “High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips”- IEEE NEMS-2014.
Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors
E.Mehdizadeh, V. Kumar and Siavash Pourkamali, “Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors”-IEEE NEMS-2014.
Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing
X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013.
Nano-precision force and displacement measurement using MEMS resonant structures
E. Mehdizadeh, A. Hajjam, A. Rahafrooz and S. Pourkamali, “Nano-precision force and displacement measurement using MEMS resonant structures,” IEEE Sensors Conference, 2013.
A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring
E. Mehdizadeh, V. Kumar, J. Gonzales, R. Abdolvand, and S. Pourkamali, “A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring”, IEEE Sensors Conference, 2013.
Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography
E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.