E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.
E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.