E. Mehdizadeh, A. Hajjam, A. Rahafrooz and S. Pourkamali, “Nano-precision force and displacement measurement using MEMS resonant structures,” IEEE Sensors Conference, 2013.
E. Mehdizadeh, A. Hajjam, A. Rahafrooz and S. Pourkamali, “Nano-precision force and displacement measurement using MEMS resonant structures,” IEEE Sensors Conference, 2013.