E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.