A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring

E. Mehdizadeh, V. Kumar, J. Gonzales, R. Abdolvand, and S. Pourkamali, “A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring”, IEEE Sensors Conference, 2013.