X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013. 
X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013.