Tag Archives: vlsi-mems
Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography
E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.
Posted in Publications, Refereed Conference Publications
Tagged vlsi-mems
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