Author Archives: Web Admin
Hydrogen detection using thermally actuated MEMS resonators
B. Tousifar, A. Rahafrooz, and S. Pourkamali, “Hydrogen detection using thermally actuated MEMS resonators,” proceedings, IEEE Sensors Conference, 2011.
Fabrication and characterization of MEMS-based resonant organic gas sniffers
A. Hajjam, A. Logan, and S. Pourkamali, “Fabrication and characterization of MEMS-based resonant organic gas sniffers,” proceedings, IEEE Sensors Conference, 2011.
Developing a Fully Cycled Silicon Cathode-Zinc Electrolyte Based Solar Cell Using Copper Recovery Electrodes
B. Tousifar, W. Douglas, and S. Pourkamali, “Developing a Fully Cycled Silicon Cathode-Zinc Electrolyte Based Solar Cell Using Copper Recovery Electrodes,” 37th IEEE Photovoltaic Specialists Conference (PVSC), 2011.
Individual air-borne particle mass measurement using high frequency micromechanical resonators
A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011
High frequency thermally actuated electromechanical resonators with piezoresistive readout
A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011.
Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto
F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.
Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR)
F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent No. 7,176,770, February 2007.
Electrically-coupled micro-electro-mechanical filter systems and methods
F. Ayazi, and S. Pourkamali, “Electrically-coupled micro-electro-mechanical filter systems and methods,” US patent No.7,098,757, August 2006.
Methods of forming oxide masks with submicron openings therein and microstructures formed thereby
F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings therein and microstructures formed thereby,” US patent No. 7,056,757, June 2006.
Capacitive resonators and methods of fabrication
F. Ayazi, and S. Pourkamali, “Capacitive resonators and methods of fabrication,” US patent No. 7,023,065, April 2006.