Author Archives: Web Admin
I-shaped thermally actuated VHF resonators with submicron components
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013.
Thermal-piezoresistive energy pumps in micromechanical resonant structures
A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.
Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors
A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012.
Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators
A. Rahafrooz, and S. Pourkamali, “Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators,” IEEE International Frequency Control Symposium, 2012.
Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators
X. Guo, A. Rahafrooz, Y-B Yi, S. Pourkamali, “Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators,” IEEE International Frequency Control Symposium, 2012.
Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.
Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.
Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators,” IEEE MEMS 2012.
Thermally actuated I-shaped electromechanical VHF resonators
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “Thermally actuated I-shaped electromechanical VHF resonators,” IEEE MEMS 2012.
Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization
A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012.