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F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.
F. Ayazi, S. Pourkamali and G. K. Ho, “Capacitive Vertical Silicon Bulk Acoustic Resonator (SiBAR),” US patent No. 7,176,770, February 2007.
F. Ayazi, and S. Pourkamali, “Electrically-coupled micro-electro-mechanical filter systems and methods,” US patent No.7,098,757, August 2006.
F. Ayazi, R. Abdolvand and S. Pourkamali, “Methods of forming oxide masks with submicron openings therein and microstructures formed thereby,” US patent No. 7,056,757, June 2006.
F. Ayazi, and S. Pourkamali, “Capacitive resonators and methods of fabrication,” US patent No. 7,023,065, April 2006.