Tag Archives: thermally-actuated

Thermal-piezoresistive energy pumps in micromechanical resonant structures

A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.

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Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization

A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012.

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High frequency thermally actuated electromechanical resonators with piezoresistive readout

A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011.

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Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization

A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization,” proceedings, IEEE International Electron Device Meeting (IEDM), 2010.

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Fully Micromechanical Piezo-Thermal Oscillators

A. Rahafrooz, and S. Pourkamali, “Fully Micromechanical Piezo-Thermal Oscillators,” IEEE International Electron Device Meeting (IEDM), 2010.

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Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators

A. Rahafrooz, and S. Pourkamali, “Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators,” Hilton Head 2010, solid-state sensor, actuator and Microsystems workshop.

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Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators

A. Rahafrooz, A. Hajjam, B. Tousifar, S. Pourkamali, “Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators,” proceedings, IEEE MEMS conference, 2010, pp. 200-203.

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