F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.
F. Ayazi, G. K. Ho, and S. Pourkamali, “Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto,” US patent No. 7,511,870, March 2009.