A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.