A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.