A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators,” IEEE MEMS 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators,” IEEE MEMS 2012.