A. Rahafrooz, and S. Pourkamali, “Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators,” Hilton Head 2010, solid-state sensor, actuator and Microsystems workshop.
A. Rahafrooz, and S. Pourkamali, “Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators,” Hilton Head 2010, solid-state sensor, actuator and Microsystems workshop.