A. Rahafrooz, A. Hajjam, B. Tousifar, S. Pourkamali, “Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators,” proceedings, IEEE MEMS conference, 2010, pp. 200-203.
A. Rahafrooz, A. Hajjam, B. Tousifar, S. Pourkamali, “Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators,” proceedings, IEEE MEMS conference, 2010, pp. 200-203.