Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization

A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization,” proceedings, IEEE International Electron Device Meeting (IEDM), 2010.