Category Archives: Publications
Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid
A. Rahafrooz, and S. Pourkamali, “Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid,” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases
A. Hajjam, A. Logan, J. Pandiyan, and S. Pourkamali, “High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
Bulk modes in single-crystal silicon
G. K. Ho, S. Pourkamali, and F. Ayazi, “Bulk modes in single-crystal silicon” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators
A. Rahafrooz, S. Pourkamali, “Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators,” IEEE MEMS conference, 2011.
Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures
A. Rahafrooz, S. Pourkamali, “Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures,” IEEE MEMS conference, 2011.
Temperature compensated single-device electromechanical oscillators
A. Hajjam, A. Rahafrooz, S. Pourkamali, “Temperature compensated single-device electromechanical oscillators,” IEEE MEMS conference, 2011.
Self-sustained micromechanical resonant particlute microbalance/counters
A. Hajjam, J. Wilson, A. Rahafrooz, and S.Pourkamali, “Self-sustained micromechanical resonant particlute microbalance/counters,” IEEE MEMS conference, 2011.
Rotational Mode Disk Resonators for High-Q Operation in Liquid
A. Rahafrooz, and S. Pourkamali, “Rotational Mode Disk Resonators for High-Q Operation in Liquid,” IEEE Sensors Conference, 2010.
Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization,” proceedings, IEEE International Electron Device Meeting (IEDM), 2010.
Fully Micromechanical Piezo-Thermal Oscillators
A. Rahafrooz, and S. Pourkamali, “Fully Micromechanical Piezo-Thermal Oscillators,” IEEE International Electron Device Meeting (IEDM), 2010.