Tag Archives: controlled-batch

Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures

A. Rahafrooz, S. Pourkamali, “Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures,” IEEE MEMS conference, 2011.

Posted in Publications, Refereed Conference Publications | Tagged | Comments Off on Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures