High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases

A. Hajjam, A. Logan, J. Pandiyan, and S. Pourkamali, “High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases” 2011 IEEE International Frequency Control Symposium (IFCS 2011).