Author Archives: Web Admin
Thermal actuation of high frequency micromechanical resonators
A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Thermal actuation of high frequency micromechanical resonators,” proceedings, IEEE SOI conference, 2009.
Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution
A. Rahafrooz, S. Pourkamali, “Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution,” Proceedings, IEEE Electron Devices and Solid-State Circuits Conference, 2008.
Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers
S. Pourkamali, and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” Proceedings, IEEE Sensors, 2007.
Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters
Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium, pp1649-1652.
High-aspect-ratio SOI vibrating micromechanical resonators and filters
F. Ayazi, S. Pourkamali, G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating micromechanical resonators and filters,” invited paper, proceedings, International Microwave Symposium, 2006 (IMS’06), pp. 676-679.
A low phase noise 100MHz silicon BAW reference oscillator
K. Sundaresan, G. K. Ho, S. Pourkamali and F. Ayazi, “A low phase noise 100MHz silicon BAW reference oscillator,” proceedings, Custom Integrated Circuit Conference, 2006 (CICC’06).
High frequency low impedance silicon BAR structures
S. Pourkamali and F. Ayazi, “High frequency low impedance silicon BAR structures,” Proceedings, Hilton Head 2006, solid-state sensor, actuator and Microsystems workshop, pp. 284-287.
Temperature compensated IBAR reference oscillators
G.K. Ho, K. Sundaresan, S. Pourkamali and F. Ayazi, “Temperature compensated IBAR reference oscillators,” proceeding, MEMS’06, pp. 910-913.
Vertical Capacitive SiBARs
S. Pourkamali, G. K. Ho and F. Ayazi, “Vertical Capacitive SiBARs,” proceedings, MEMS’05, pp. 211-214.
Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators
G.K. Ho, K. ndaresan, S. Pourkamali and F. Ayazi, “Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators,” proceedings, MEMS’05, pp. 116-120.