S. Pourkamali and F. Ayazi, “High frequency low impedance silicon BAR structures,” Proceedings, Hilton Head 2006, solid-state sensor, actuator and Microsystems workshop, pp. 284-287.
S. Pourkamali and F. Ayazi, “High frequency low impedance silicon BAR structures,” Proceedings, Hilton Head 2006, solid-state sensor, actuator and Microsystems workshop, pp. 284-287.