Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium, pp1649-1652.
Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium, pp1649-1652.