A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Thermal actuation of high frequency micromechanical resonators,” proceedings, IEEE SOI conference, 2009.
A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Thermal actuation of high frequency micromechanical resonators,” proceedings, IEEE SOI conference, 2009.