F. Ayazi, S. Pourkamali, G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating micromechanical resonators and filters,” invited paper, proceedings, International Microwave Symposium, 2006 (IMS’06), pp. 676-679.
F. Ayazi, S. Pourkamali, G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating micromechanical resonators and filters,” invited paper, proceedings, International Microwave Symposium, 2006 (IMS’06), pp. 676-679.