Category Archives: Publications
Piezoelectric rotational mode disk resonators for liquid viscosity monitoring
E. Mehdizadeh, J. Gonzales, A. Rahafrooz, R. Abdolvand, and S. Pourkamali, “Piezoelectric rotational mode disk resonators for liquid viscosity monitoring,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing
A. Rahafrooz, and S. Pourkamali, “Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation
A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013.
I-shaped thermally actuated VHF resonators with submicron components
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013.
Thermal-piezoresistive energy pumps in micromechanical resonant structures
A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.
Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors
A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012.
Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators
A. Rahafrooz, and S. Pourkamali, “Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators,” IEEE International Frequency Control Symposium, 2012.
Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators
X. Guo, A. Rahafrooz, Y-B Yi, S. Pourkamali, “Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators,” IEEE International Frequency Control Symposium, 2012.
Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.
Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.