Category Archives: Journal Publications
Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing
X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013.
Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation
A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013.
I-shaped thermally actuated VHF resonators with submicron components
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013.
Thermal-piezoresistive energy pumps in micromechanical resonant structures
A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.
Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors
A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012.
Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization
A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012.
Individual air-borne particle mass measurement using high frequency micromechanical resonators
A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011
High frequency thermally actuated electromechanical resonators with piezoresistive readout
A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling
A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010.