Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling

A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010. pdf