Category Archives: Journal Publications
Micromachined Frequency-output Force Probes
M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.
Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.
Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer
V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.
Nanoelectromechanical resonant narrow-band amplifiers
Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).
Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips
E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014.
Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014.
Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining
E. Mehdizadeh, A. Rahafrooz, and S. Pourkamali, “Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining,” Nanotechnology 25, 315303, pp1-7, July 2014.
Microelectromechanical disk resonators for direct detection of liquid-phase analytes
E. Mehdizadeh, J. C. Chapin, J. M. Gonzales, A. Rahafrooz, R. Abdolvand, By. W. Purse, and S. Pourkamali, “Microelectromechanical disk resonators for direct detection of liquid-phase analytes,” Sensors and Actuators A: Physical, vol. 216, pp. 136–141, September 2014.
Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification
E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014.
A finite element analysis of thermoelastic damping in vented MEMS beam resonators
X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013.