Tag Archives: Ultra-Sensitive Resonant MEMS

Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification

E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014.

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