Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid

E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014. pdf