Author Archives: Web Admin
Single crystal silicon HARPSS capacitive resonators with submicron gap spacings
S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling
A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010.
Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators
G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators,” Journal of Micro-Electro-Mechanical-Systems, vol. 19, no. 3, pp. 503–515, June 2010.
Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators
A. Rahafrooz, and S. Pourkamali, “Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 115003, September 2009.
Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators
Y. Yi, A. Rahafrooz, and S. Pourkamali, “Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators,” J. Micro/Nanolith. MEMS MOEMS, vol. 8, no. 2, 023010, May 2009.
Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2017–2023, August 2007.
Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2024–2030, August 2007.
Electronically temperature compenstated silicon bulk acoustic resonator reference oscillator
K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, vol. 42, no. 6, pp. 1425–1434, June 2007.
News Item 1
Xiaobo is joining us in summer as a Postdoc student.