E. Mehdizadeh and S. Pourkamali, “Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films,” The 40th Annual Conference of the IEEE Industrial Electronics Society, 2014.
E. Mehdizadeh and S. Pourkamali, “Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films,” The 40th Annual Conference of the IEEE Industrial Electronics Society, 2014.