Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations

M. Maldonado Garcia, E. Mehdizadeh, V. Kumar, J.C Wilson and S. Pourkamali, “Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations”, To be presented at IEEE MEMS 2015.